Response time ≤ 5 ms. Slim size. Light weight. Leak detection. Suitable for the semiconductor industry.
- Response time ≤ 5 ms
- Slim size
- Light weight
- Confirmation of small object adsorption
- Leak detection
- Suitable for the semiconductor industry
| Measured flow rate range | -10 ~ 10 L/min |
|---|---|
| Flow direction | Unidirection, Bidirectional |
| Rated pressure range | -100 ~ 200 kPa |
| Withstand pressure | 300 kPa |
| Fluid | Dry air, N2, Non-corrosive / Non-flammable gas |
| Power supply voltage | 15 ~ 24V DC ±10%, Ripple (P-P) ≤ 10% |
| Current consumption | ≤ 20mA |
| Accuracy-Repeatability | ≤ ± 2% F.S. |
| Accuracy-Linearity | Non-linearity |
| Accuracy-Temp. characteristic (*1) | ≤ ± 0.3% F.S./°C ~ ≤ ± 0.6% F.S./°C |
| Accuracy-Pressure characteristic (*2) | ± 5% F.S. ~ ± 10% F.S. |
| Response time | ≤ 5ms (90% Response time) |
| Indicator | Green LED |
| Analog output | Voltage output range: 1~5V ±5% F.S. (±0.2V) (Non-linearity), Output Impedance: 1 KΩ |
| Environment | IP40 |
| Environment-Working fluid temp. | 0 ~ 50°C (No condensation or freezing) |
| Environment-Ambient temp. range | Operation : 0 ~ 50°C ; Storage : -10 ~ 60°C (No condensation or freezing) |
| Environment-Ambient humidity Range | Operation : 0 ~ 50°C ; Storage : -10 ~ 60°C (No condensation or freezing) |
| Environment-Withstand voltage | 1000V AC in 1-min (between case and lead wire) |
| Environment-Insulation resistance | ≥ 50MΩ (500V DC, between case and lead wire) |
| Environment-Vibration | Total amplitude 1.5mm or 10G, 10 Hz – 55 Hz – 10 Hz scan for 1 minute, 2 hours each direction of X, Y and Z |
| Environment-Shock | 100m/s2 (10G), 3 times each in direction of X, Y and Z |
| Lead Wire | Ø2.6 oil-resistance cable (PVC) – 26 AWG ( 0.15 mm2 ) – 3 cores |
| Weight-Product | Product: Approx. 4 g (w/o Port) ; Approx. 9.6 g (M5 Port), Lead wire (3M): 31.8 g |
| Remark | *1. Benchmark : 25°C (Temperature range : 0 ~ 50°C) *2. Benchmark : 150 kPa (Pressure range : -100 ~ 200 kPa) |
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